Electrical performance of Al2O3 gate dielectric films deposited by atomic layer deposition on 4H-SiC

By C. Tanner, Ya-Chuan Perng, C. Frewin, S. Saddow, Jane P. Chang. 2007

167 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/d56ff58ad305322b0e1c86770b6a0f3dd78e99f4