Reduction of traps and improvement of carrier lifetime in 4H-SiC epilayers by ion implantation

By L. Storasta, H. Tsuchida. 2007

175 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/d3a186a311ab15782c51c84c38f36347de98e9e6