Magnetic MEMS: key issues and some applications

By D. Niarchos. 2003

192 citations recorded by the source corpus.

Subfields: Computer Networks and Communications, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/d2237f0ca7d8d7817a65d61d25bfa3c9b397cc53

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Computer Networks and Communications

1. Naigang Wang
2. D. P. Arnold

In Electrical and Electronic Engineering

1. Naigang Wang
2. D. P. Arnold

Citations in the corpus

• Review of Microscale Magnetic Power Generation (2007, unknown): “Additionally, there have been many recent developments in methods for depositing relatively thick hard magnetic (PM) materials [13]–[16] for microscale applications.”
• Permanent Magnets for MEMS (2009, methodology): “Sputtering, evaporation, and electroplating have been used to form microstructures of soft Ni, Fe, and Co alloys [7], [8], enabling a host of sensors, actuators, and micromachines [9].”