Removal of SU-8 photoresist for thick film applications

By P. Dentinger, W. Miles Clift, S. Goods. 2002

144 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/d1f2e779916488b5fa4650f493796d896ebcceca

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In Electrical and Electronic Engineering

1. R. Dobbs
2. John H. Booske
3. C. Kory
4. Colin D. Joye
5. George R. Neil
6. Jaehun Park
7. R. Temkin
8. G. Park

Citations in the corpus

• Vacuum Electronic High Power Terahertz Sources (2011, methodology): “Several groups have successfully used X-ray LIGA [53], [172], [173], [176], which has the advantage of forming very straight sidewalls and vertical aspect ratios of up to 100:1, but this technique requires a costly synchrotron X-ray source, several hours of exposure time and gold masks instead of th”