Electrostatic modelling of dual frequency rf plasma discharges

By P. Boyle, A. Ellingboe, M. Turner. 2004

144 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Radiology, Nuclear Medicine and Imaging

View Paper: https://www.semanticscholar.org/paper/d177ebd74b4145225b6d181406f9b5bd23596082