MEMS-Micropumps: A Review
By Nam-Trung Nguyen, Xiao-Yang Huang, T. K. Chuan. 2002
610 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/d125d18aec8c80caf162be2cf3a3b0236b727785
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Biomedical Engineering
- Brian D. Iverson
- Suresh V. Garimella
- T. Squires
- Stephen R. Quake
- Zilin Chen
- Ping Wang
- Hsueh-Chia Chang
- Christophe Yamahata
In Electrical and Electronic Engineering
- T. Squires
- Suresh V. Garimella
- Zilin Chen
- Ping Wang
- Hsueh-Chia Chang
- Brian D. Iverson
- M. Gijs
- Werayut Srituravanich
Citations in the corpus
- A new electro-osmotic pump based on silica monoliths (2006, background): “Generally, they can be divided into two categories [ 4 ,5]: (i) displacement (mechanical) pumps and (ii) dynamic pumps.”
- Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “There are numerous MEMS devices around us such as micro accelerometers [45, 46], DMD [45, 47, 48], MEMS pressure sensors [49, 50], micropumps [58-60], microvalves [61], optical switches [62, 63], inkjet heads, microgrippers [64, 65], and microactuators [66-70].”
- Recent advances in microscale pumping technologies: a review and evaluation (2008, background): “Several extensive reviews of micropump strategies are available (Laser and Santiago 2004; Nguyen et al. 2002; Woias 2005), with some having emphasized specific applications (Singhal et al.”
- A PMMA valveless micropump using electromagnetic actuation (2005, background): “Since then, other integrated silicon-based micropumps, mostly based on piezoelectric actuation, have been proposed (Nguyen et al. 2002; Tay and Choong 2002).”
- Microfluidics: Fluid physics at the nanoliter scale (2005, background): “…et al., 2002; Lion et al., 2003 , microfluidics based on micromechanical systems MEMS Ho and Tai, 1998; Verpoorte and De Rooij, 2003 , micropumps Nguyen et al., 2002; Laser and Santiago, 2004 , clinical and forensic applications Thormann et al., 2001; Verpoorte, 2002 , sample pretreatment…”
- Plastic micropump with ferrofluidic actuation (2005, neutral): “based on piezoelectric actuation, were proposed [7], [8].”