Fabrication of low-loss channel waveguides in Al2O3 and Y2O3 layers by inductively coupled plasma reactive ion etching

By Jonathan D. B. Bradley, F. Ay, K. Worhoff, Markus Pollnau. 2007

153 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/d00cfd2a4281904c9f377e9b658f81a17fdaa068

Citations in the corpus

• Reliable Low-Cost Fabrication of Low-Loss $\hbox{Al}_{2}\hbox{O} _{3}{:}\hbox{Er}^{3+}$ Waveguides With 5.4-dB Optical Gain (2009, unknown): “Process details are described elsewhere [26].”