Optical characterization of HfO2 thin films grown by atomic layer deposition

By J. Aarik, H. Mändar, M. Kirm, Lembit Pung. 2004

185 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/cfb737d67c921ebd906848f719eb792819cfb018