Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection

By Thomas P. Burg, A. Mirza, N. Milović, C. Tsau, George A. Popescu, J. Foster, Scott R. Manalis. Journal of microelectromechanical systems, 2006

162 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/cf4b450490a72739795660dcae620e2e5750c6c6

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  1. P. Thiruvenkatanathan
  2. J. Woodhouse
  3. Jize Yan

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