Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses

By T. Kondo, S. Matsuo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa. 2003

195 citations recorded by the source corpus.

Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/ceb7d3c3716e08a975255ad6e0e4dd62547f3b3d

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Citations in the corpus

• A review of ultrafast laser materials micromachining (2013, background): “From multiple-beam interference [57–59] to micro-lens array [60–62], previous studies have demonstrated many approaches to create multiple beams to improve the throughput of the ultrafast laser microfabrication.”