A new two-dimensional ultrasonic assisted grinding (2D-UAG) method and its fundamental performance in monocrystal silicon machining
By Zhiqiang Liang, Yongbo Wu, Xibin Wang, Wenxiang Zhao. 2010
161 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering
View Paper: https://www.semanticscholar.org/paper/ce238d2e423a8c228906268e4de3a7dbc3f275b5
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In Biomedical Engineering
In Electrical and Electronic Engineering
In Mechanical Engineering
Citations in the corpus
- Fabrication and Machining of Metal Matrix Composites: A Review (2016, result): “[132] concluded the similar results while the ultrasonic-assisted grinding (UAG) of silicon, where an axial vibration gives a better surface roughness.”