Pulsed high-density plasmas for advanced dry etching processes

By S. Banna, A. Agarwal, G. Cunge, M. Darnon, E. Pargon, O. Joubert. 2012

164 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/cd5820b1375876a2d4e6bd07f7f4ec00194d6d83