A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement

By A. Kimura, Wei Gao, Woojae Kim, K. Hosono, Y. Shimizu, Lei Shi, Lijiang Zeng. 2012

139 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Mechanical Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/cd4073196a9558c9d16aab626ba9f5ca1b9b68f6