Plasma-aided nanofabrication: where is the cutting edge?

By Ken Ostrikov, Alexander B. Murphy. 2007

224 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/cce40d132bb643230b244bc207dd8bab7ab67038

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Anthony B. Murphy
2. M. Shigeta

In Materials Chemistry

1. Anthony B. Murphy
2. M. Shigeta

In Mechanics of Materials

1. Anthony B. Murphy
2. M. Shigeta

Citations in the corpus

• Thermal plasmas for nanofabrication (2011, methodology): “For the experimental works before the early 2000s, detailed reviews are found in the paper written by Ostrikov and Murphy [13] and chapter 3 of the book edited by Cabral and Silva [14].”