Recent developments and challenges of nanopositioning and nanomeasuring technology

By E. Manske, G. Jäger, T. Hausotte, R. Füßl. 2012

200 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/cc5a665b9099374f05f69bc6ea49142fb59865fe

Citations in the corpus

• An insight into optical metrology in manufacturing (2020, unknown): “The application of an optical angle sensor, as well as the design of a positioning system complying with the Abbe principle, could be a solution to further reduce the uncertainty of precision positioning [6, 29].”