Physical and electrical properties of noncrystalline Al2O3 prepared by remote plasma enhanced chemical vapor deposition

By R. Johnson, G. Lucovsky, Isreal Baumvol. 2001

175 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/cc0aed62a6fb9df83f1a67a8482c4351456d116c