Effect of sputtering target power on microstructure and mechanical properties of nanocomposite nc-TiN/a-SiNx thin films

By Sam Zhang, Deen Sun, Y. Fu, H. Du. 2004

138 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/cb94d052f18451be4dc66e872052a6c782690283