Fabrication of vertically aligned carbon nanowalls using capacitively coupled plasma-enhanced chemical vapor deposition assisted by hydrogen radical injection

By M. Hiramatsu, K. Shiji, H. Amano, M. Hori. 2004

350 citations recorded by the source corpus.

Subfields: Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/cb85587db0462d1d1333a54ed20773878b0f899f

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In Materials Chemistry

1. Junhong Chen
2. G. Lu
3. Haejune Kim
4. B. Song
5. Ali Reza Mostofizadeh
6. Yanwei Li
7. Kehan Yu
8. Zheng Bo

Citations in the corpus

• Synthesis of Graphene and Its Applications: A Review (2010, neutral): “68 , 69 , 70 , 72 In one of these publications, Zhu et al.”
• Synthesis, properties, and applications of low-dimensional carbon-related nanomaterials (2011, methodology): “[149, 150] synthesized carbon nanowalls on a Si substrate without catalysts using capacitively coupled RFPECVD by H atom injection.”
• One-step fabrication and capacitive behavior of electrochemical double layer capacitor electrodes using vertically-oriented graphene directly grown on metal (2012, positive): “The PECVD-grown VG sheets are maze-like two-dimensional (2D) or flower-like three-dimensional (3D) networks of graphene nanosheets vertically standing on the substrate, which could be adjusted by growth parameters such as gaseous precursor [14], gas/substrate temperature [15], electric field [16], a”