Differences in anisotropic etching properties of KOH and TMAH solutions

By M. Shikida, Kazuo Sato, K. Tokoro, Daisuke Uchikawa. 2000

259 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/cb81a9845bb7cdca1bf805a0f895b4bc1c0cb420

Citations in the corpus

• Microneedle-based drug delivery systems: Microfabrication, drug delivery, and safety (2010, unknown): “The crystal planes in silicon limit anisotropic wet etching (Kern, 1978; Clark & Edell, 1987; Shikida et al., 2000; Banks, 2006).”