A wireless batch sealed absolute capacitive pressure sensor
By Orhan Akar, Tayfun Akin, Khalil Najafi. 2001
260 citations recorded by the source corpus.
Abstract This paper reports the development of an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated planar coil. Applied pressure deflects a 6 μm-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode supported on a glass substrate. The resonant frequency of the LC circuit formed by the capacitor and the inductor changes as the capacitance changes; this change is sensed remotely through inductive coupling, eliminating the need for wire connection or implanted telemetry circuits. The sensor is fabricated using the dissolved-wafer process and utilizes a boron-doped silicon diaphragm supported on an insulating glass substrate. The complete sensor measures 2.6 mm ×1.6 mm in size and incorporates a 24-turns gold-electroplated coil that has a measured inductance of 1.2 μH. The sensor is designed to provide a resonant frequency change in the range 95–103 MHz for a pressure change in the range 0–50 mmHg with respect to ambient pressure, providing a pressure responsivity and sensitivity of 160 kHz/mmHg and 1553 ppm/mmHg, respectively. The measured pressure responsivity and sensitivity of the fabricated device are 120 kHz/mmHg and 1579 ppm/mmHg, respectively.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/ca999f18c1a8943fbae0ccb2b2b18aad0eada9b1
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- LC Passive Wireless Sensors Toward a Wireless Sensing Platform: Status, Prospects, and Challenges (2016, unknown): “fabricated an absolute pressure sensor by the bulk silicon dissolved wafer process [60].”
- Fixed-wing MAV attitude stability in atmospheric turbulence—Part 2: Investigating biologically-inspired sensors (2014, background): “There are several design variants of the capacitive pressure sensor permitting improved sensitivity and dynamic range (Park and Gianchandani, 2003, Park and Gianchandani, 2000, Ming-Shuang et al., 2007, Akar et al., 2001, Yamamoto et al., 2002, Daigle et al., 2007).”
- A wireless microsystem for the remote sensing of pressure, temperature, and relative humidity (2005, methodology): “One method uses fully passive sensing devices that shift the resonant frequency of an LC tank and are monitored through a wireless link [ 2 ]‐[5].”