Optical and electro-optical properties of submicrometer lithium niobate slab waveguides prepared by crystal ion slicing and wafer bonding

By P. Rabiei, P. Günter. 2004

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Electro–optically tunable microring resonators in lithium niobate (2007, methodology): “A new technique, based on crystal ion slicing and wafer bonding, has been developed recently to produce submicrometre thin films of single-crystalline qualit”
Advances in on-chip photonic devices based on lithium niobate on insulator (2020, background): “nitride (SiN) [146–148], silicon [70,149–153], chalcogenide glass (ChG) [154], tantalum pentoxide (Ta2O5) [29], and titanium dioxide (TiO2) [155], were directly deposited or bonded on thin-film LN and fabricated into ridge waveguides using semiconductor processing techniques.”
Ultra-low-loss integrated visible photonics using thin-film lithium niobate (2019, methodology): “Our work builds on recently developed thin film lithium niobate (TFLN) substrates [36] and the novel fabrication method [37] which enabled realization of high-performance electro-optical (EO) modulators [38–40] and Kerr and EO frequency combs [41,42] in telecom wavelength range (1500-1650nm).”
Reduced Material Loss in Thin-film Lithium Niobate Waveguides (2022, background): “For example, it has been speculated that ion slicing process, used to create TFLN from bulk LN [7], may result in implantation damage that could yield higher optical absorption in TFLN than in polished bulk LN.”