The origin of stresses in magnetron-sputtered thin films with zone T structures

By R. Daniel, K. Martinschitz, J. Keckes, C. Mitterer. 2010

182 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/c94084ee92580a3d54a0ab61b2b55bb50d77c639