Understanding the discharge voltage behavior during reactive sputtering of oxides

By D. Depla, S. Heirwegh, S. Mahieu, J. Haemers, R. Gryse. 2007

184 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/c8e61d6b8eca2a553b6db3683439c2a9a161d3c2

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. K. Ellmer
2. A. Bikowski

In Mechanics of Materials

1. K. Ellmer

Citations in the corpus

• Intrinsic and extrinsic doping of ZnO and ZnO alloys (2016, background): “ISEE coefficients of the oxides of different metals taken from [289, 290] with permission from AIP Publishing LLC.”