Precision readout circuits for capacitive microaccelerometers

By N. Yazdi, Haluk Kulah, Khalil Najafi. Proceedings of IEEE Sensors, 2004., 2004

138 citations recorded by the source corpus.

This paper presents a review of capacitive readout front-end circuits for high-precision accelerometers. The primary design parameters and the trade-offs affecting the resolution are presented. The discussions apply to all capacitive microsensor interfaces. Also, a high-sensitivity capacitive accelerometer interface circuit for hybrid-integration with a surface/bulk micromachined micro-g accelerometer is described. The first generation of the circuit resolves 75 aF of capacitance on /spl sim/120 pF parasitic capacitance with a 200 kHz sampling rate, and the second generation resolves 20 aF with 1 MHz sampling rate. The overall sensor-circuit module has a noise floor of 1.6 /spl mu/g//spl radic/Hz at ambient atmosphere.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c8d70b1af35e1066f8af23bded628ee966f45815