Chemical vapor deposition of Si nanowires nucleated by TiSi2 islands on Si

By T. Kamins, R. S. Williams, Yong Chen, Ying-lan Chang, Y. Chang. 2000

157 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c874368b96d169b7f66b6597ab98e56909f09284