Study of the composition of hydrogenated silicon nitride SiNx:H for efficient surface and bulk passivation of silicon

By J. Lelievre, E. Fourmond, A. Kaminski, O. Palais, D. Ballutaud, M. Lemiti. 2009

170 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c86d80727442582d96ed8117d8c5a912c5804ee2