Surface passivation of III-V compound semiconductors using atomic-layer-deposition grown Al2O3

By M. Huang, M. Hong, Y. Chang, C. H. Chang, Y. J. Lee, P. Chang, T. B. Wu, J. Kwo. 2005

327 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c868d9d039a579379cb8e96448e5d447cfe8c352