Changes in surface layer of silicon wafers from diamond scratching

By Zhenyu Zhang, Bo Wang, R. Kang, Bi Zhang, D. Guo. 2015

239 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c8601685a63f8cf3e81e23f2f6ccd3d2ddabbdf9