Processing of thin SU-8 films

By Stephan Sylvest Keller, G. Blagoi, Michael Lillemose, D. Haefliger, Anja Boisen. 2008

190 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c839aa3abf8b756db4fe548bf76bdd60770acf14

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Yasin Orooji
2. Fatemeh Ejeian
3. A. Razmjou
4. Shohreh Azadi
5. M. Asadnia
6. M. Warkiani
7. A. Kottapalli

Citations in the corpus

• Design and applications of MEMS flow sensors: A review (2019, background): “There have been significant efforts reported in the literature to overcome these issues including by using solvent content [159] and optimising the fabrication process parameters [160].”