Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

By G. Janssen, Mostafa Abdalla, Fred van Keulen, B. R. Pujada, B. V. Venrooy. 2009

684 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c7cbe9c494f6c81003eafd610738ac91b27beedd

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In Biomedical Engineering

  1. Kenneth D. Harris
  2. A. Elias
  3. Hyun‐Joong Chung

In Electrical and Electronic Engineering

  1. Kenneth D. Harris
  2. A. Elias
  3. Hyun‐Joong Chung

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