Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM

By M. Aman Haque, M. Saif. 2002

159 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/c74392f2022accd46ffddcef329c1717ab8b5bb2

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Horacio Espinosa
2. Yong Zhu
3. N. Moldovan

In Electrical and Electronic Engineering

1. Yong Zhu
2. Horacio Espinosa
3. N. Moldovan

In Mechanics of Materials

1. Yong Zhu
2. Horacio Espinosa
3. N. Moldovan
4. Pablo D. Zavattieri

Citations in the corpus

• Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization (2007, methodology): “Following a different approach, Haque and Saif [ 14 ] developed a microfabricated Si single crystal rig to test thin films inside SEM and TEM.”