Hydrogen plasma treatments for passivation of amorphous-crystalline silicon-heterojunctions on surfaces promoting epitaxy

By M. Mews, T. Schulze, N. Mingirulli, L. Korte. 2013

141 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c73ff2e936a05b135e62e7e6fd454be1c57e2c4a

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In Electrical and Electronic Engineering

  1. B. Rech
  2. M. Mews
  3. L. Korte

In Materials Chemistry

  1. L. Korte

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