Titanium dioxide thin films by atomic layer deposition: a review

By J. Niemelä, Giovanni Marín, M. Karppinen. 2017

151 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c7399df3dce04ed32684497bd12f254794c58de1