The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography

By Xuedong Chen, Xueming He. 2006

135 citations recorded by the source corpus.

Subfields: Aerospace Engineering, Applied Mathematics, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/c6dfd20610176d7ccb487ecf854ad4edb409923a