Metal-assisted chemical etching of silicon in HF–H2O2

By C. Chartier, S. Bastide, C. Lévy‐Clément. 2008

599 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c568e06acf51aed5ba98074ba06950befe00d603