Cluster beam deposition: a tool for nanoscale science and technology
By K. Wegner, P. Piseri, H. Tafreshi, P. Milani. 2006
386 citations recorded by the source corpus.
Subfields: Atmospheric Science, Electrical and Electronic Engineering, Water Science and Technology
View Paper: https://www.semanticscholar.org/paper/c4f2a61184a5d2fbf9857f9fd418d4c149c57b44
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In Electrical and Electronic Engineering
Citations in the corpus
- Flexible and stretchable electrodes for dielectric elastomer actuators (2012, background): “The clusters are then injected into the deposition chamber where they impact the target [78].”