Thermal stability of ultrathin ZrO2 films prepared by chemical vapor deposition on Si(100)

By T. Jeon, J. White, D. Kwong. 2001

264 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c49a6ff836b2e394694fc1b54bd6166ccb543833