Semiconductor fabrication: Pushing deep ultraviolet lithography to its limits

By M. Totzeck, W. Ulrich, Aksel Göhnermeier, W. Kaiser. 2007

139 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/c4493a0b0054c31f56b88b23091dcdca872ab5f9