Tuning of NiSi/Si Schottky barrier heights by sulfur segregation during Ni silicidation

By Qing-Tai Zhao, U. Breuer, E. Rije, S. Lenk, S. Mantl. 2005

141 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c2cda99c73132d3b7405ba19674e959d4530683e