Synthesis of Vertical High‐Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template

By Tomohiro Shimizu, Tian Xie, J. Nishikawa, Shoso Shingubara, S. Senz, U. Gösele. 2007

166 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c1b1a708f1f318f2719ad88a2b046d8c45221580