Atomic layer deposition-Sequential self-limiting surface reactions for advanced catalyst "bottom-up" synthesis

By Junling Lu, Jeffrey W. Elam, P. Stair. 2016

291 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/bfd644cc34f0bf400dce06b34a58c64804b3ef29