Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films

By P. Patsalas, C. Gravalidis, S. Logothetidis. 2004

141 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/bf0b59da6e798a9596bfe39dabd270382032e8c5

Citations in the corpus