XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition

By P. Motamedi, K. Cadien. 2014

230 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/bede6018adff866dce8c5c9e86f3d68754dde061