Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

By M. Moreira, J. Bjurström, Ilia Katardjev, V. Yantchev. 2011

256 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Condensed Matter Physics, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/beb2ea79e04d31feb72185ff2281d9f5bfc96f5d