Metal silicides: An integral part of microelectronics

By L. J. Chen. 2005

154 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/be4939583f4212b9bb0d3e05a5ca34212a1e97dd