Physical processes in EUV sources for microlithography

By V. Banine, K. Koshelev, G. Swinkels. 2011

218 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/bd724042b3e89df78f4110d002c2073a47beedd3