Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides

By F. Grillot, Laurent Vivien, S. Laval, D. Pascal, É. Cassan. IEEE Photonics Technology Letters, 2004

180 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/bc7f664cf12f5c2f1c94204a14fa1894645bd34d

Citations in the corpus

• Silicon Photonics: The Next Fabless Semiconductor Industry (2013, unknown): “Propagation loss can be reduced either by process optimization to smooth the sidewall [29] or by waveguide geometry optimization to reduce modal field strength at the sidewall [30].”