Review: Developments in micro/nanoscale fabrication by focused ion beams

By Chung-Soo Kim, Sung-hoon Ahn, D. Jang. 2012

197 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Structural Biology

View Paper: https://www.semanticscholar.org/paper/bc53688b52908730e0a9de6990cc15b9eb2547c3