Multiple-spot parallel processing for laser micronanofabrication

By J. Kato, N. Takeyasu, Y. Adachi, Hongbo Sun, Satoshi Kawata. 2005

305 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/bbaa6209ebb7c48c7ba4a8f7fdbfbc0a5eca480a

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1. K. Watkins
2. Jian Cheng
3. G. Dearden
4. Changsheng Liu
5. Dun Liu
6. S. Shang
7. W. Perrie

Citations in the corpus

• A review of ultrafast laser materials micromachining (2013, background): “From multiple-beam interference [57–59] to micro-lens array [60–62], previous studies have demonstrated many approaches to create multiple beams to improve the throughput of the ultrafast laser microfabrication.”
• Ultrafast Laser Applications in Manufacturing Processes: A State-of-the-Art Review (2019, unknown): “…scanning probe microscopy [96], near-fi eld scanning optical microscopy [97], plasmonic nanolitho-graphy [98 – 100], microlens array nanolithography [101,102], and interference lithography [98,103], nano-features of tens of nanometers were successfully fabricated on various material surfaces…”