Mechanical design and optimization of capacitive micromachined switch

By J.-M. Huang, K. M. Liew, C. Wong, S. Rajendran, M. Tan, Ai Qun Liu. 2001

244 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/bb7e8bdf2024e28209ba15cdd2b66d1443211ce4

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Vijay K. Varadan

In Electrical and Electronic Engineering

1. K. Vinoy
2. Vijay K. Varadan
3. Yuriy V. Pershin
4. M. Di Ventra

Citations in the corpus

• RF MEMS and Their Applications (2002, methodology): “The mechanical characteristics, including effective stiffness constant and static contact deformation, were studied using a static model, and a dynamic model was used for calculation of switching speed and frequency of operation (Huang et al., 2001).”